Active Pneumatic Suspention SystemMRZ series
Active Pneumatic Suspention System
Based on MAPS series, we have developed high performance and reasonable Active Pneumatic Suspention System MRZ series!
- For Measurement
- For Semiconductor
- Unit type
FPD・semicondoctor equipment、Electron microscopy、UHV-SPM、Measuring machine、Ultraprecision machine、etc.
Active vibration isolation in six degrees of freedom
Each unit has two air pressure actuators: vertical and horizontal, and can experience excellent performance of vibration isolation, vibration suppression and precise positioning.
FloorFF: Floor Feedforward
StageFF: Stage Feedforward (Option)
「Light and Compact」「Save Electricity 」「Reasonable Price」！
Realize Light weight and compact, save electricity, and reasonable price.
Japanese Patent No. 5457821
|Payload Range per 4 units[kg]||4,000～12,800||10,000～32,000|
|Dimensions of a Unit W×D×H [mm]||504x404x191||694x594x191|
|Mass of a Unit [kg/unit]||60||110|
|Supplied Air Pressure [MPa]||0.6～0.8(Clean dry air)|
|Typical Air Consumption [l/min]||120～170|
|Maximum Air Consumption [l/min]||300|
|Power Supply Voltage [V]||(Single-Phase AC,50/60Hz)|
|Maximum Power Consumption[VA]||120|
|Environmental Temperature [℃]||0～40|
|Relative Humidity [%RH]||35～85|
|Vibration Isolation method||Vibration Isolation by Air Pressure Control|
|Dimensions of Controller W×D×H [mm]||435x300x118|
|Mass of a Controller [kg]||7.5|
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