As a recognized expert in vibration isolation technology, Meiriz Seiki Co.,Ltd is committed to providing optimal solution to customers' vibration problems.

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Active Pneumatic Suspention SystemMRZ series

Active Pneumatic Suspention System

Based on MAPS series, we have developed high performance and reasonable Active Pneumatic Suspention System MRZ series!

  • Active

Business Fields

  • For Measurement
  • For Semiconductor
Active Pneumatic Suspention System MRZ series
  • Unit type

Features

Applications

FPD・semicondoctor equipment、Electron microscopy、UHV-SPM、Measuring machine、Ultraprecision machine、etc.

Active vibration isolation in six degrees of freedom

Each unit has two air pressure actuators: vertical and horizontal, and can experience excellent performance of vibration isolation, vibration suppression and precise positioning.

FB+FloorFF control

FB: Feedback
FloorFF: Floor Feedforward
StageFF: Stage Feedforward (Option)

「Light and Compact」「Save Electricity 」「Reasonable Price」!

Realize Light weight and compact, save electricity, and reasonable price.

Patent

Japanese Patent No. 5457821

Specifications

  • SPECIFICATIONS
  • Transmissibility
  • Drawing
TypeMRZ-200MRZ-330MRZ-520
Payload Range per 4 units[kg]1,500~4,4004,000~12,80010,000~32,000
Dimensions of a Unit W×D×H [mm]324x252x191504x404x191694x594x191
Mass of a Unit [kg/unit]3460110
Supplied Air Pressure [MPa]0.6~0.8(Clean dry air)
Typical Air Consumption [l/min]45~65120~170
Maximum Air Consumption [l/min]120300
 Power Supply Voltage [V]100~240(Single-Phase AC,50/60Hz)
Maximum Power Consumption[VA]120
Environmental Temperature [℃]0~40
Relative Humidity [%RH]35~85
Vibration Isolation methodVibration Isolation by Air Pressure Control
Dimensions of Controller [mm]W435xD300xH118
Mass of a Controller [kg]7.5
MRZ-200S Vibration Transmissibility

MRZ-200S Vibration Transmissibility

MRZ drawing

MRZ drawing

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